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Improved angular resolution in electron backscatter diffraction analysis by use of image correlation techniques
In this paper we describe a method for improving the angular resolution of the electron backscatter diffraction(EBSD)technique based on a correlative matching of EBSD patterns.Standard image interpolation methods are used to detect shifts between selected regions of the EBSD patterns to an accuracy of one tenth of a pixel.Simulated data sets are used to show that such accuracy,combined with a small angle approximation in calculation of the rotation angle,allows determination of the misorientation between patterns to an accuracy of 0.01 degrees.The method is tested on samples of both single crystal aluminum and recrystallized nickel.The results demonstrate the accuracy and stability of the new method compared to the conventional method.